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XCDA(XPS)

XCDA Purifier

High-Tech 기술과 최상의 Service 제공을 통해서 고객에게는 만족과 감동을 드립니다.

  • Category MEL-XPS-1K MEL-XPS-2K MEL-XPS-2.3K
    Purification H2O < 100ppt < 100ppt < 100ppt
    Total Volatile Bases < 1ppt < 1ppt < 1ppt
    Total Volatile Acids < 1ppt < 1ppt < 1ppt
    TOCnv & TOCv < 1ppt < 1ppt < 1ppt
    Refractories < 1ppt < 1ppt < 1ppt
    Flow Flow 1,000slm (60m3/h) 2,000slm (120m3/h) 2,300slm (138m3/h)
    Particle Outlet Filtration ISO Class1 ISO Class1 ISO Class1
    Application EUV DUV, EUV DUV, EUV
    Main Power 3PH / 308V 3PH / 308V 3PH / 308V
    Development Schedule Developed in 2023 Released in 2023 Developed in 2023