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THC(Temperature & Humidity Control System)
Temperature & Humidity Control System
High-Tech 기술과 최상의 Service 제공을 통해서 고객에게는 만족과 감동을 드립니다.
| Wafer Size (mm) | Process | Additional features | |
|---|---|---|---|
|
Released in 2010 ~ SERIES - RSACS-R10 (S) 
|
300 | EUV, Immersion, ArF, KrF, i-line, SOC | High productivity, High throughput, High defect performance, OEE improvement with reduced cost of chemicals |
|
Released in 2010 ~ SERIES - MSALCS-M5Z 
|
300 | PI, Package, SOD, OCCF, etc. | Flexible configuration for multiple application, High reliability & productivity based on LITHIUS ProTM Z system |
|
Released in 2018 ~ SERIES - VSACS-V4+ 
|
300 | EUV, Immersion, ArF, KrF, i-line, SOC | High productivity & process performance, Low particle wafer transfer system, OEE improvement, Reduced cost of chemicals |
|
Released in 2022 ~ SERIES - M+SACS-M7Z+ 
|
300 | Immersion, ArF, KrF, i-line, SOC | High productivity, High throughput with small footprint, OEE improvement, Flexible configuration for double patterning process |