It is a system that adjusts the air temperature, humidity and air current in a way best conforming to the intention of the user.
To control the temperature/humidity environment of the coater and developer equipment for photolithography and of the PR throughout the semiconductor manufacturing process
Control Spec. | Temp. | THC | S.V ± 0.1℃ |
Humid. | S.V ± 0.5% | ||
Temp. | CHR | S.V ± 0.1℃ |
Control Spec. | Temp. | THC | S.V ± 0.1℃ |
Humid. | S.V ± 0.5% |
It is a system that controls the humidity within the chamber by cooling down the indoor air.
To control the humidity of the etch and wet equipment throughout the semiconductor manufacturing process
Temperature/humidity control performance |
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It is a system that adjusts the temperature of the liquid(constant-temperature water) in a way suitable for user requirements.
To control the motor, flow and water temperature of the coater and developer equipment for photolithography throughout the semiconductor manufacturing process
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